Yoo, Chue San. <br/><br/>
Semiconductor manufacturing technology / 
Chue San Yoo. 
 - Hackensack, N.J. ;  London :  World Scientific,  c2008. 
 - xii, 470 p. :  ill. ;  24 cm. 
 - Advanced series in electrical and computer engineering ;  v. 13 .
<br/><br/> Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9789812568236 9812568239 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.<br/>Semiconductor industry.