00779nam a2200217 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112100001900120245006000139260006000199300003400259440006800293500005100361650004500412650002800457856007600485vtls000032284KUKTEM20251117145318.0081114s2008    njua     b    001 0 eng    a9789812568236  a9812568239  aUMP1 aYoo, Chue San.10aSemiconductor manufacturing technology /cChue San Yoo.  aHackensack, N.J. ;aLondon :bWorld Scientific,cc2008.  axii, 470 p. :bill. ;c24 cm. 0aAdvanced series in electrical and computer engineering ;vv. 13  aIncludes bibliographical references and index. 0aSemiconductorsxDesign and construction. 0aSemiconductor industry.413Table of contentsuhttp://www.loc.gov/catdir/toc/fy0804/2008299033.html