Defects in microelectronic materials and devices /
edited by Daniel M. Fleetwood, Sokrates T. Pantelides, Ronald D. Schrimpf
- Boca Raton : CRC Press, 2009
- xvi, 753 p. : ill. ; 26 cm.
Includes bibliographical references and index
9781420043761
Microelectronics--Materials--Testing Metal oxide semiconductor field-effect transistors--Testing Integrated circuits--Defects