Fleetwood, Daniel M.

Defects in microelectronic materials and devices / edited by Daniel M. Fleetwood, Sokrates T. Pantelides, Ronald D. Schrimpf - Boca Raton : CRC Press, 2009 - xvi, 753 p. : ill. ; 26 cm.

Includes bibliographical references and index

9781420043761


Microelectronics--Materials--Testing
Metal oxide semiconductor field-effect transistors--Testing
Integrated circuits--Defects