@book{44548,
	author = {IET Seminar on Micro Electro-Mechanical Systems (MEMS) Tachnology},
	title = {IET Seminar on Micro Electro-Mechanical Systems (MEMS) Tachnology 2007, April 25, 2007, London, UK /},
	publisher = {Institution of Engineering and Technology,},
	year = {[2007]},
	address = {Stevenage, UK :}
}