IET Seminar on Micro Electro-Mechanical Systems (MEMS) Tachnology 2007, April 25, 2007, London, UK / 
 IET seminar digest 
Institution of Engineering and Technology 
 - Stevenage, UK :  Institution of Engineering and Technology,  [2007] 
 - 67 p. :  ill. ;  28 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781605600307 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Congresses