00747nam a2200181 a 4500001001400000003000700014005001700021008004100038020001800079040000800097111009200105245014800197246002300345260007200368300002800440504005000468650004700518vtls000030138KUKTEM20251117145345.0080710t2007    xxkda  f      100 0 eng d  a9781605600307  aUMP2 aIET Seminar on Micro Electro-Mechanical Systems (MEMS) Tachnologyd(2007 :cLondon, UK)10aIET Seminar on Micro Electro-Mechanical Systems (MEMS) Tachnology 2007, April 25, 2007, London, UK /cInstitution of Engineering and Technology33aIET seminar digest  aStevenage, UK :bInstitution of Engineering and Technology,c[2007]  a67 p. :bill. ;c28 cm.  aIncludes bibliographical references and index 0aMicroelectromechanical systemsvCongresses