TY  - BOOK
ED  - IET Seminar on Micro Electro-Mechanical Systems (MEMS) Tachnology
TI  - IET Seminar on Micro Electro-Mechanical Systems (MEMS) Tachnology 2007, April 25, 2007, London, UK
SN  - 9781605600307
PY  - 2007///]
CY  - Stevenage, UK
PB  - Institution of Engineering and Technology
KW  - Microelectromechanical systems
KW  - Congresses
N1  - Includes bibliographical references and index
ER  -