TY  - BOOK
AU  - Hessel,Volker
TI  - Micro process engineering: a comprehensive handbook 
SN  - 9783527315505 (set)
PY  - 2009///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Production engineering
KW  - Microtechnology
N1  - Vol. 1: Fundamentals, operations and catalysts -- vol. 2: Devices, reactions and applications -- vol. 3: System, process and plant engineering
ER  -