Nastasi, Michael Anthony <br/><br/>
Ion implantation and synthesis of materials / 
M. Nastasi, J.W. Mayer 
 - Berlin ;  New York :  Springer-Verlag,  c2006 
 - xiii, 263 p. :  ill. ;  24 cm. 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>3540236740 9783540236740 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ion implantation