TY - BOOK AU - Nastasi,Michael Anthony AU - Mayer,James W. TI - Ion implantation and synthesis of materials SN - 3540236740 PY - 2006/// CY - Berlin, New York PB - Springer-Verlag KW - Ion implantation N1 - Includes bibliographical references and index UR - http://www.loc.gov/catdir/enhancements/fy0817/2006930120-t.html ER -