CMOS front-end materials and process technology :  symposium held April 22-24, 2003, San Francisco, California, U.S.A. / 
editors, Tsu-Jae King ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  c2003 
 - xi, 308 p. :  ill. ;  24 cm. 
 - Materials Research Society symposia proceedings ;  v. 765 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558997028 1558997024 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Metal oxide semiconductors--Materials--Congresses<br/>Metal oxide semiconductors, Complementary--Materials--Congresses<br/>Nanostructured materials--Congresses<br/>Gate array circuits--Materials--Congresses<br/>Dielectrics--Congresses