TY  - BOOK
AU  - King,Tsu-Jae
TI  - CMOS front-end materials and process technology: symposium held April 22-24, 2003, San Francisco, California, U.S.A. 
SN  - 9781558997028
PY  - 2003///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Metal oxide semiconductors
KW  - Materials
KW  - Congresses
KW  - Metal oxide semiconductors, Complementary
KW  - Nanostructured materials
KW  - Gate array circuits
KW  - Dielectrics
N1  - Includes bibliographical references and indexes
ER  -