Atomic layer deposition of nanostructured materials / 
edited by Nicola Pinna, Mato Knez 
 - Weinheim, GER :  Wiley-VCH,  2012 
 - xxxvi, 435 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9783527327973 3527327975 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemical vapor deposition<br/>Nanostructured materials