TY  - BOOK
AU  - Pinna,Nicola
AU  - Knez,Mato
TI  - Atomic layer deposition of nanostructured materials
SN  - 9783527327973
PY  - 2012///
CY  - Weinheim, GER
PB  - Wiley-VCH
KW  - Chemical vapor deposition
KW  - Nanostructured materials
N1  - Includes bibliographical references and index
ER  -