Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /
editors, Theodore M. Besmann, Bernard M. Gallois
- Pittsburgh, PA : Materials Research Society, c1990
- xiii, 399 p. : ill. ; 24 cm.
- Materials Research Society symposium proceedings, v. 168 .
- Materials Research Society symposia proceedings ; v. 168 .