00926nam a2200229 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245019400120260005700314300003500371490006200406504005200468650003500520650003000555700002500585700002400610830006200634vtls000060579KUKTEM20251117145431.0120529t1990 paudao f 001 0 eng d a9781558990562 a1558990569 aUMP00aChemical vapor deposition of refractory metals and ceramics :bsymposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /ceditors, Theodore M. Besmann, Bernard M. Gallois aPittsburgh, PA :bMaterials Research Society,cc1990 axiii, 399 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings,vv. 168 aIncludes bibliographical references and indexes 0aRefractory coatingxCongresses 0aVapor-platingxCongresses1 aBesmann, Theodore M.1 aGallois, Bernard M. 0aMaterials Research Society symposia proceedings ;vv. 168