TY - BOOK AU - Besmann,Theodore M. AU - Gallois,Bernard M. TI - Chemical vapor deposition of refractory metals and ceramics: symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. T2 - Materials Research Society symposium proceedings, SN - 9781558990562 PY - 1990/// CY - Pittsburgh, PA PB - Materials Research Society KW - Refractory coating KW - Congresses KW - Vapor-plating N1 - Includes bibliographical references and indexes ER -