@book{46515,
	author = {Tu, K. N. and Materials Research Society.},
	title = {Advanced metallization for future ULSI :},
	publisher = {Materials Research Society ,},
	year = {c1996},
	series = {Materials Research Society symposium proceedings ;},
	address = {Pittsburgh, Pa :},
	note = {Papers presented at the symposium on advanced metallization for future ULSI, which was part of the 1996 MRS spring meeting of Materials Research Society held in San Francisco from April 8-12, 1996}
}