Advanced metallization for future ULSI :  symposium held April 8-11, 1996, San Francisco, California, U.S.A. / 
editors, K.N. Tu ... [et al.] 
 - Pittsburgh, Pa :  Materials Research Society ,  c1996 
 - xiii, 597 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 427 .
 - Materials Research Society symposia proceedings ;  v.427 .
<br/><br/> Papers presented at the symposium on advanced metallization for future ULSI, which was part of the 1996 MRS spring meeting of Materials Research Society held in San Francisco from April 8-12, 1996 
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558993303 1558993304 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Ultra large scale integration--Design and construction--Congresses<br/>Metallizing--Congresses<br/>Metallic films--Congresses<br/>Semiconductors--Design and construction--Congresses