01550nam a2200313 a 4500 vtls000060049 KUKTEM 20251117145441.0 120522t1996 paua f b 101 0 eng d 9781558993303 1558993304 201212051147 fauzi 201205221555 safura UMP TK7874.76 .A383 1996 Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A. / editors, K.N. Tu ... [et al.] Pittsburgh, Pa : Materials Research Society , c1996 xiii, 597 p. : ill. ; 24 cm. Materials Research Society symposium proceedings ; v. 427 Papers presented at the symposium on advanced metallization for future ULSI, which was part of the 1996 MRS spring meeting of Materials Research Society held in San Francisco from April 8-12, 1996 Includes bibliographical references and indexes Integrated circuits Ultra large scale integration Design and construction Congresses Metallizing Congresses Metallic films Congresses Semiconductors Design and construction Congresses Tu, K. N. Materials Research Society. Meeting (1996 : San Francisco, Calif.) Materials Research Society symposia proceedings ; v.427 0 0 0 0 20000 20000 2019-09-04 107.07 0 TK7874.76 .A383 1996 0000068308 2019-09-04 00:00:00 1 107.07 2019-09-04 OPEN VIRTUA40 46515 46521 VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5000*5040*6500*6501*6502*6503*7000*7100*8300*9992