symposium held April 8-11, 1996, San Francisco, California, U.S.A Tu, K. N. Materials Research Society Meeting (1996 : San Francisco, Calif.) text bibliography conference publication pau Pittsburgh, Pa Materials Research Society c1996 1996 monographic eng

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xiii, 597 p. : ill. ; 24 cm. specialized editors, K.N. Tu ... [et al.] Papers presented at the symposium on advanced metallization for future ULSI, which was part of the 1996 MRS spring meeting of Materials Research Society held in San Francisco from April 8-12, 1996 Includes bibliographical references and indexes Integrated circuits Ultra large scale integration Design and construction Congresses Metallizing Congresses Metallic films Congresses Semiconductors Design and construction Congresses 9781558993303 1558993304 UMP 120522 20251117145441.0 vtls000060049