TY  - BOOK
AU  - Tu,K.N.
ED  - Materials Research Society.
TI  - Advanced metallization for future ULSI: symposium held April 8-11, 1996, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558993303
PY  - 1996///
CY  - Pittsburgh, Pa
PB  - Materials Research Society
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Design and construction
KW  - Congresses
KW  - Metallizing
KW  - Metallic films
KW  - Semiconductors
N1  - Papers presented at the symposium on advanced metallization for future ULSI, which was part of the 1996 MRS spring meeting of Materials Research Society held in San Francisco from April 8-12, 1996; Includes bibliographical references and indexes
ER  -