01698nam a2200325 a 4500001001400000003000700014005001700021008004100038020001800079020001500097039004600112040000800158090002500166245014600191260005800337300003500395490006300430500020100493504005200694650009200746650002800838650003100866650005600897700001400953710007400967830006101041952013601102999002701238999010701265vtls000060049KUKTEM20251117145441.0120522t1996    paua   f b    101 0 eng d  a9781558993303  a1558993304 9a201212051147bfauziy201205221555zsafura  aUMP  aTK7874.76 .A383 199600aAdvanced metallization for future ULSI :bsymposium held April 8-11, 1996, San Francisco, California, U.S.A. /ceditors, K.N. Tu ... [et al.]  aPittsburgh, Pa :bMaterials Research Society ,cc1996  axiii, 597 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 427  aPapers presented at the symposium on advanced metallization for future ULSI, which was part of the 1996 MRS spring meeting of Materials Research Society held in San Francisco from April 8-12, 1996  aIncludes bibliographical references and indexes 0aIntegrated circuitsxUltra large scale integrationxDesign and constructionvCongresses 0aMetallizingvCongresses 0aMetallic filmsvCongresses 0aSemiconductorsxDesign and constructionvCongresses1 aTu, K. N.2 aMaterials Research Society.bMeetingd(1996 :cSan Francisco, Calif.) 0aMaterials Research Society symposia proceedings ;vv.427  00104070a20000b20000d2019-09-04g107.07l0oTK7874.76 .A383 1996p0000068308r2019-09-04 00:00:00t1v107.07w2019-09-04yOPEN  aVIRTUA40c46515d46521  aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5000*5040*6500*6501*6502*6503*7000*7100*8300*9992