@book{46627,
	author = {Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" ˜d (2007 : œc San Francisco, Calif.) and Zwicker, Gerfried},
	title = {Advances and challenges in chemical mechanical planarization :},
	publisher = {Materials Research Society,},
	year = {2007},
	series = {Materials Research Society symposium proceedings ;},
	address = {Warrendale, PA. :},
	note = {"Proceedings ... presented at Symposium C, ’Advances and Challenges in Chemical Mechanical Planarization,’ held April 10-12 at the 2007 MRS Spring Meeting"--Pref.}
}