Advances and challenges in chemical mechanical planarization :  symposium held April 10-12, 2007, San Francisco, California, U.S.A. / 
editors, Gerfried Zwicker ... [et al.] 
 - Warrendale, PA. :  Materials Research Society,  2007 
 - xi, 371 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 991 .
 - Materials Research Society symposium proceedings ;  v. 991 .
<br/><br/> "Proceedings ... presented at Symposium C, ’Advances and Challenges in Chemical Mechanical Planarization,’ held April 10-12 at the 2007 MRS Spring Meeting"--Pref. 
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>1558999515 9781558999510 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Materials--Congresses<br/>Semiconductors--Surfaces--Congresses<br/>Chemical mechanical planarization--Congresses