01265nam a2200253 a 4500001001400000003000700014005001700021008004100038020001500079020001800094040000800112111011900120245017800239260005700417300003300474490006300507500017100570504005200741650004200793650004100835650005000876700002200926830006300948vtls000060092KUKTEM20251117145445.0120523t2007    paua   f      001 0 eng d  a1558999515  a9781558999510  aUMP2 aSymposium C, "Advances and Challenges in Chemical Mechanical Planarization" ˜d (2007 : œc San Francisco, Calif.)00aAdvances and challenges in chemical mechanical planarization :bsymposium held April 10-12, 2007, San Francisco, California, U.S.A. /ceditors, Gerfried Zwicker ... [et al.]  aWarrendale, PA. :bMaterials Research Society,c2007  axi, 371 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 991  a"Proceedings ... presented at Symposium C, ’Advances and Challenges in Chemical Mechanical Planarization,’ held April 10-12 at the 2007 MRS Spring Meeting"--Pref.  aIncludes bibliographical references and indexes 0aSemiconductorsxMaterialsvCongresses 0aSemiconductorsxSurfacesvCongresses 0aChemical mechanical planarizationvCongresses1 aZwicker, Gerfried 0aMaterials Research Society symposium proceedings ;vv. 991