01535nam a2200301 a 4500 vtls000060092 KUKTEM 20251117145445.0 120523t2007 paua f 001 0 eng d 1558999515 9781558999510 201211281204 asmadi 201205231008 safura 201205231006 safura UMP TK7871.85 .S96 2007 Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" ˜d (2007 : œc San Francisco, Calif.) Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. / editors, Gerfried Zwicker ... [et al.] Warrendale, PA. : Materials Research Society, 2007 xi, 371 p. : ill. ; 24 cm. Materials Research Society symposium proceedings ; v. 991 "Proceedings ... presented at Symposium C, ’Advances and Challenges in Chemical Mechanical Planarization,’ held April 10-12 at the 2007 MRS Spring Meeting"--Pref. Includes bibliographical references and indexes Semiconductors Materials Congresses Semiconductors Surfaces Congresses Chemical mechanical planarization Congresses Zwicker, Gerfried Materials Research Society symposium proceedings ; v. 991 0 0 0 0 10000 10000 2019-09-04 107.07 0 TK7871.85 .S96 2007 0000068360 2019-09-04 00:00:00 1 107.07 2019-09-04 OPEN VIRTUA40 46627 46633 VTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5000*5040*6500*6501*6502*7000*8300*9992