symposium held April 10-12, 2007, San Francisco, California, U.S.A Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" ˜d (2007 : œc San Francisco, Calif.) creator Zwicker, Gerfried text pau Warrendale, PA Materials Research Society 2007 monographic eng

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xi, 371 p. : ill. ; 24 cm. specialized editors, Gerfried Zwicker ... [et al.] "Proceedings ... presented at Symposium C, ’Advances and Challenges in Chemical Mechanical Planarization,’ held April 10-12 at the 2007 MRS Spring Meeting"--Pref. Includes bibliographical references and indexes Semiconductors Materials Congresses Semiconductors Surfaces Congresses Chemical mechanical planarization Congresses 1558999515 9781558999510 UMP 120523 20251117145445.0 vtls000060092