TY  - BOOK
AU  - Zwicker,Gerfried
ED  - Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" ˜d (2007 : œc San Francisco, Calif.)
TI  - Advances and challenges in chemical mechanical planarization: symposium held April 10-12, 2007, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 1558999515
PY  - 2007///
CY  - Warrendale, PA.
PB  - Materials Research Society
KW  - Semiconductors
KW  - Materials
KW  - Congresses
KW  - Surfaces
KW  - Chemical mechanical planarization
N1  - "Proceedings ... presented at Symposium C, ’Advances and Challenges in Chemical Mechanical Planarization,’ held April 10-12 at the 2007 MRS Spring Meeting"--Pref; Includes bibliographical references and indexes
ER  -