01682nam a2200313 a 4500001001400000003000700014005001700021008004100038020001500079020001800094039006900112040000800181090002400189111011900213245017800332260005700510300003300567490006300600500017100663504005200834650004200886650004100928650005000969700002201019830006301041952013501104999002701239999010201266vtls000060092KUKTEM20251117145445.0120523t2007    paua   f      001 0 eng d  a1558999515  a9781558999510 9a201211281204basmadic201205231008dsafuray201205231006zsafura  aUMP  aTK7871.85 .S96 20072 aSymposium C, "Advances and Challenges in Chemical Mechanical Planarization" ˜d (2007 : œc San Francisco, Calif.)00aAdvances and challenges in chemical mechanical planarization :bsymposium held April 10-12, 2007, San Francisco, California, U.S.A. /ceditors, Gerfried Zwicker ... [et al.]  aWarrendale, PA. :bMaterials Research Society,c2007  axi, 371 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 991  a"Proceedings ... presented at Symposium C, ’Advances and Challenges in Chemical Mechanical Planarization,’ held April 10-12 at the 2007 MRS Spring Meeting"--Pref.  aIncludes bibliographical references and indexes 0aSemiconductorsxMaterialsvCongresses 0aSemiconductorsxSurfacesvCongresses 0aChemical mechanical planarizationvCongresses1 aZwicker, Gerfried 0aMaterials Research Society symposium proceedings ;vv. 991  00104070a10000b10000d2019-09-04g107.07l0oTK7871.85 .S96 2007p0000068360r2019-09-04 00:00:00t1v107.07w2019-09-04yOPEN  aVIRTUA40c46627d46633  aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5000*5040*6500*6501*6502*7000*8300*9992