<?xml version="1.0" encoding="UTF-8"?>
<record
    xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
    xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd"
    xmlns="http://www.loc.gov/MARC21/slim">

  <leader>01778nam a2200361 a 4500</leader>
  <controlfield tag="001">vtls000060231</controlfield>
  <controlfield tag="003">KUKTEM</controlfield>
  <controlfield tag="005">20251117145445.0</controlfield>
  <controlfield tag="008">120524t2007    paua   f b    101 0 eng d</controlfield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="a">9781558999497</subfield>
  </datafield>
  <datafield tag="020" ind1=" " ind2=" ">
    <subfield code="a">1558999493</subfield>
  </datafield>
  <datafield tag="039" ind1=" " ind2="9">
    <subfield code="a">201212061444</subfield>
    <subfield code="b">fauzi</subfield>
    <subfield code="y">201205241452</subfield>
    <subfield code="z">safura</subfield>
  </datafield>
  <datafield tag="040" ind1=" " ind2=" ">
    <subfield code="a">UMP</subfield>
  </datafield>
  <datafield tag="090" ind1=" " ind2=" ">
    <subfield code="a">TK7871.99.A45 S96 2007</subfield>
  </datafield>
  <datafield tag="111" ind1="2" ind2=" ">
    <subfield code="a">Symposium A, "Amorphous and Polycrystalline Thin-Film Silicon Science and Technology"</subfield>
    <subfield code="d">(2007 :</subfield>
    <subfield code="c">San Francisco, Calif.)</subfield>
  </datafield>
  <datafield tag="245" ind1="0" ind2="0">
    <subfield code="a">Amorphous and polycrystalline thin-film silicon science and technology--2007 :</subfield>
    <subfield code="b">symposium held April 9-13, 2007, San Francisco, California, U.S.A. /</subfield>
    <subfield code="c">editors: Virginia Chu ... [et al.]</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="a">Warrendale, Pa. :</subfield>
    <subfield code="b">Materials Research Society,</subfield>
    <subfield code="c">c2007</subfield>
  </datafield>
  <datafield tag="300" ind1=" " ind2=" ">
    <subfield code="a">xx, 594 p. :</subfield>
    <subfield code="b">ill. ;</subfield>
    <subfield code="c">24 cm.</subfield>
  </datafield>
  <datafield tag="490" ind1="1" ind2=" ">
    <subfield code="a">Materials Research Society symposium proceedings ;</subfield>
    <subfield code="v">v. 989</subfield>
  </datafield>
  <datafield tag="500" ind1=" " ind2=" ">
    <subfield code="a">"Symposium A, 'Amorphous and Polycrystalline Thin-Film Silicon Science and Technology--2007,' was held April 9-13 at the 2007 MRS Spring Meeting in San Francisco, California"--Pref.</subfield>
  </datafield>
  <datafield tag="504" ind1=" " ind2=" ">
    <subfield code="a">Includes bibliographical references and indexes</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Amorphous semiconductors</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Semiconductor films</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Silicon crystals</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Inhomogeneous materials</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Thin film devices</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Crystal growth</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Chemical vapor deposition</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Solar cells</subfield>
    <subfield code="v">Congresses</subfield>
  </datafield>
  <datafield tag="700" ind1="1" ind2=" ">
    <subfield code="a">Chu, Virginia</subfield>
  </datafield>
  <datafield tag="830" ind1=" " ind2="0">
    <subfield code="a">Materials Research Society symposia proceedings ;</subfield>
    <subfield code="v">v. 989</subfield>
  </datafield>
  <datafield tag="952" ind1=" " ind2=" ">
    <subfield code="0">0</subfield>
    <subfield code="1">0</subfield>
    <subfield code="4">0</subfield>
    <subfield code="7">0</subfield>
    <subfield code="a">20000</subfield>
    <subfield code="b">20000</subfield>
    <subfield code="d">2019-09-04</subfield>
    <subfield code="g">300.53</subfield>
    <subfield code="l">0</subfield>
    <subfield code="o">TK7871.99.A45 S96 2007</subfield>
    <subfield code="p">0000068337</subfield>
    <subfield code="r">2019-09-04 00:00:00</subfield>
    <subfield code="t">1</subfield>
    <subfield code="v">300.53</subfield>
    <subfield code="w">2019-09-04</subfield>
    <subfield code="y">OPEN</subfield>
  </datafield>
  <datafield tag="999" ind1=" " ind2=" ">
    <subfield code="a">VIRTUA40</subfield>
    <subfield code="c">46633</subfield>
    <subfield code="d">46639</subfield>
  </datafield>
  <datafield tag="999" ind1=" " ind2=" ">
    <subfield code="a">VTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5000*5040*6500*6501*6502*6503*6504*6505*6506*6507*7000*8300*9992</subfield>
  </datafield>
</record>
