@book{46709,
	author = {Vilaithong, Thiraphat. and PIM & ASIP 2004},
	title = {Particle beams & plasma interaction on materials and ion & plasma finishing 2004 :},
	publisher = {Trans Tech Publications,},
	year = {c2005},
	series = {Solid state phenomena,},
	address = {Uetikon-Zuerich :}
}