Particle beams & plasma interaction on materials and ion & plasma finishing 2004 :  proceedings of PIM & ASIP 2004, 25-27 November 2004, Chiang Mai, Thailand / 
edited by T. Vilaithong, D. Boonyawan and C. Thongbai 
 - Uetikon-Zuerich :  Trans Tech Publications,  c2005 
 - xii, 160 p. :  ill. ;  25 cm. 
 - Solid state phenomena,  v. 107  1012-0394 ; .
 - Solid state phenomena,  v. 107 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9783908451129 3908451124 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma engineering--Congresses