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  <titleInfo>
    <title>Particle beams &amp; plasma interaction on materials and ion &amp; plasma finishing 2004</title>
    <subTitle>proceedings of PIM &amp; ASIP 2004, 25-27 November 2004, Chiang Mai, Thailand</subTitle>
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  <name type="personal">
    <namePart>Vilaithong, Thiraphat.</namePart>
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  <name type="personal">
    <namePart>Boonyawan, D.</namePart>
  </name>
  <name type="personal">
    <namePart>Thongbai, C.</namePart>
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  <name type="conference">
    <namePart>PIM &amp; ASIP 2004 (2004 : Chiang Mai, Thailand)</namePart>
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    <publisher>Trans Tech Publications</publisher>
    <dateIssued>c2005</dateIssued>
    <dateIssued encoding="marc">2005</dateIssued>
    <issuance>monographic</issuance>
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    <extent>xii, 160 p. : ill. ; 25 cm.</extent>
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  <targetAudience authority="marctarget">specialized</targetAudience>
  <note type="statement of responsibility">edited by T. Vilaithong, D. Boonyawan and C. Thongbai</note>
  <note>Includes bibliographical references and index</note>
  <subject authority="lcsh">
    <topic>Plasma engineering</topic>
    <topic>Congresses</topic>
  </subject>
  <relatedItem type="series">
    <titleInfo>
      <title>Solid state phenomena, v. 107</title>
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  <identifier type="isbn">9783908451129</identifier>
  <identifier type="isbn">3908451124</identifier>
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