TY  - BOOK
AU  - Vilaithong,Thiraphat
AU  - Boonyawan,D.
AU  - Thongbai,C.
ED  - PIM & ASIP 2004
TI  - Particle beams & plasma interaction on materials and ion & plasma finishing 2004: proceedings of PIM & ASIP 2004, 25-27 November 2004, Chiang Mai, Thailand 
T2  - Solid state phenomena,
SN  - 9783908451129
PY  - 2005///
CY  - Uetikon-Zuerich
PB  - Trans Tech Publications
KW  - Plasma engineering
KW  - Congresses
N1  - Includes bibliographical references and index
ER  -