02026nam a2200361 a 4500001001400000003000700014005001700021008004100038020001800079020001500097039009200112040000800204090002400212111003800236245040500274246001300679260005800692300003500750490006500785504005200850650005600902650007800958650009201036650002701128650003101155650002801186700002401214710007701238830006501315952013501380999002701515999012201542vtls000060030KUKTEM20251117145451.0120522t2008    paua   f b    101 0 eng d  a9781558999923  a1558999922 9a201710021127bAUTHORITYc201212031254dfauzic201212031140dfauziy201205221529zsafura  aUMP  aTK7871.85 .A38 20082 aAdvanced Metallization Conference10aAdvanced Metallization Conference 2007 (AMC 2007) :bproceedings of the conference held October 9-11, 2007, in Albany, New York, U.S.A. and October 9-11, 2007, at University of Tokyo, Tokyo, Japan. This Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. /ceditors, Gary W. Ray ... [et al]30aAMC 2007  aWarrendale, Pa. :bMaterials Research Society,cc2008  axxii, 719 p. :bill. ;c24 cm.1 aMaterials Research Society conference proceedingsx1048-0854  aIncludes bibliographical references and indexes 0aSemiconductorsxDesign and constructionvCongresses 0aIntegrated circuitsxUltra large scale integrationxMaterialsvCongresses 0aIntegrated circuitsxUltra large scale integrationxDesign and constructionvCongresses 0aThin filmsvCongresses 0aMetallic filmsvCongresses 0aMetallizingvCongresses1 aMcKerrow, Andrew J.2 aUniversity of California, Berkeley.bContinuing Education in Engineering 0aMaterials Research Society conference proceedingsx1048-0854  00104070a20000b20000d2019-09-04g342.61l0oTK7871.85 .A38 2008p0000068301r2019-09-04 00:00:00t1v342.61w2019-09-04yOPEN  aVIRTUA40c46837d46843  aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*4900*5040*6500*6501*6502*6503*6504*6505*7000*7100*8300*9992