01585nam a2200313 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112111003800120245026000158246001300418260005800431300003400489490005400523500017300577504005200750650005600802650009200858650007800950650002701028650003101055650002801086700002601114710007701140830005401217vtls000060022KUKTEM20251117145452.0120522t2006    paua     b    101 0 eng d  a9781558998650  a1558998659  aUMP2 aAdvanced Metallization Conference10aAdvanced Metallization Conference 2005 (AMC 2005) :bproceedings of the conference held September 27-29, 2005, in Colorado Springs, Colorado, U.S.A., and October 13-14, 2005, University of Tokyo, Tokyo, Japan /ceditors, Sywert H. Brongersma  ... [et al.]30aAMC 2005  aWarrendale, Pa. :bMaterials Research Society,cc2006  axxv, 755 p. :bill. ;c24 cm.1 aMaterials Research Society conference proceedings  a"This conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."  aIncludes bibliographical references and indexes 0aSemiconductorsxDesign and constructionvCongresses 0aIntegrated circuitsxUltra large scale integrationxDesign and constructionvCongresses 0aIntegrated circuitsxUltra large scale integrationxMaterialsvCongresses 0aThin filmsvCongresses 0aMetallic filmsvCongresses 0aMetallizingvCongresses1 aBrongersma, Sywert H.2 aUniversity of California, Berkeley.bContinuing Education in Engineering 0aMaterials Research Society conference proceedings