@book{46908,
	author = {Li, Yuzhuo},
	title = {Microelectronic applications of chemical mechanical planarization /},
	publisher = {John Wiley,},
	year = {2007},
	address = {Hoboken, N.J. :},
	note = {"Wiley Interscience."},
	url = {http://www.loc.gov/catdir/toc/ecip0715/2007015557.html}
}