Microelectronic applications of chemical mechanical planarization / 
edited by Yuzhuo Li 
 - Hoboken, N.J. :  John Wiley,  2007 
 - xxv, 734 p. :  ill. ;  24 cm. 
<br/><br/> "Wiley Interscience." 
<br/><br/>Includes bibliographical references 
<br/><br/><label>ISBN: </label>9780471719199 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction<br/>Chemical mechanical planarization<br/>Microelectronics--Materials