TY  - BOOK
AU  - Li,Yuzhuo
TI  - Microelectronic applications of chemical mechanical planarization
SN  - 9780471719199
PY  - 2007///
CY  - Hoboken, N.J.
PB  - John Wiley
KW  - Integrated circuits
KW  - Design and construction
KW  - Chemical mechanical planarization
KW  - Microelectronics
KW  - Materials
N1  - "Wiley Interscience."; Includes bibliographical references
UR  - http://www.loc.gov/catdir/toc/ecip0715/2007015557.html
ER  -