Chemical-Mechanical Polishing 2000 :  fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A. / 
editors, Rajiv K. Singh ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  c2001 
 - 1 v. (various pagings) :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 613 .
 - Materials Research Society symposia proceedings ;  v. 613 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558995215 1558995218 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrolytic polishing--Congresses<br/>Grinding and polishing--Congresses<br/>Chemical mechanical planarization--Congresses