TY  - BOOK
AU  - Singh,R.K.
TI  - Chemical-Mechanical Polishing 2000: fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558995215
PY  - 2001///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Electrolytic polishing
KW  - Congresses
KW  - Grinding and polishing
KW  - Chemical mechanical planarization
N1  - Includes bibliographical references and indexes
ER  -