Materials modification by energetic atoms and ions :  Symposium held April 28-30, 1992, San Francisco, California, USA / 
editors by Kenneth S. Grabowski ... [et al.] 
 - Pittsburgh, PA :  Materials Research Society,  c1992 
 - xiii, 405 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 268 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781558991637 1558991638 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Etching--Congresses<br/>Plasma etching--Congresses<br/>Ion bombardment--Congresses<br/>Thin films--Congresses