TY  - BOOK
AU  - Grabowski,Kenneth S.
TI  - Materials modification by energetic atoms and ions: Symposium held April 28-30, 1992, San Francisco, California, USA 
T2  - Materials Research Society symposium proceedings
SN  - 9781558991637
PY  - 1992///
CY  - Pittsburgh, PA
PB  - Materials Research Society
KW  - Semiconductors
KW  - Etching
KW  - Congresses
KW  - Plasma etching
KW  - Ion bombardment
KW  - Thin films
N1  - Includes bibliographical references and index
ER  -