Ion beam processes in advanced electronic materials and device technology :  symposium held April 15-18, 1985, San Francisco, California, U.S.A. / 
editors, B. R. Appleton, F. H. Eisen, T. W. Sigmon 
 - Pittsburgh, PA :  Materials Research Society,  c1985 
 - xv, 393 p. :  ill. ;  24 cm. 
 - Materials Research Society symposia proceedings ;  v. 45 .
 - Materials Research Society symposia proceedings .
<br/><br/>Includes bibliographies references and index 
<br/><br/><label>ISBN: </label>9780931837104 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Congresses<br/>Ion implantation--Congresses