00911nam a2200229 a 4500001001400000003000700014005001700021008004100038020001800079040000800097245020300105260005700308300003300365490006100398504004900459650003100508650003300539700002000572700001900592700001800611830005200629vtls000061812KUKTEM20251117145508.0120613t1985    paua   f b    001 0 eng d  a9780931837104  aUMP00aIon beam processes in advanced electronic materials and device technology :bsymposium held April 15-18, 1985, San Francisco, California, U.S.A. /ceditors, B. R. Appleton, F. H. Eisen, T. W. Sigmon  aPittsburgh, PA :bMaterials Research Society,cc1985  axv, 393 p. :bill. ;c24 cm.1 aMaterials Research Society symposia proceedings ;vv. 45  aIncludes bibliographies references and index 0aSemiconductorsxCongresses 0aIon implantationxCongresses1 aAppleton, B. R.1 aEisen, Fred H.1 aSigmon, T. W. 0aMaterials Research Society symposia proceedings