Ion beam processes in advanced electronic materials and device technology
symposium held April 15-18, 1985, San Francisco, California, U.S.A
Appleton, B. R.
Eisen, Fred H.
Sigmon, T. W.
text
bibliography
pau
Pittsburgh, PA
Materials Research Society
c1985
1985
monographic
eng
xv, 393 p. : ill. ; 24 cm.
specialized
editors, B. R. Appleton, F. H. Eisen, T. W. Sigmon
Includes bibliographies references and index
Semiconductors
Congresses
Ion implantation
Congresses
Materials Research Society symposia proceedings
9780931837104
UMP
120613
20251117145508.0
vtls000061812