TY  - BOOK
AU  - Appleton,B.R.
AU  - Eisen,Fred H.
AU  - Sigmon,T.W.
TI  - Ion beam processes in advanced electronic materials and device technology: symposium held April 15-18, 1985, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposia proceedings
SN  - 9780931837104
PY  - 1985///
CY  - Pittsburgh, PA
PB  - Materials Research Society
KW  - Semiconductors
KW  - Congresses
KW  - Ion implantation
N1  - Includes bibliographies references and index
ER  -