Paik, Ungyu <br/><br/>
Nanoparticle engineering for chemical-mechanical planarization :  fabrication of next-generation nanodevices / 
Ungyu Paik, Jea-Gun Park 
 - Boca Raton, FL :  CRC Press/Taylor & Francis Group,  c2009 
 - xiii, 191 p., [14] p. of plates :  ill. (some col.) ;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>1420059114 9781420059113 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemical mechanical planarization<br/>Nanoparticles<br/>Nanoelectronics