TY  - BOOK
AU  - Paik,Ungyu
AU  - Park,Jea-Gun
TI  - Nanoparticle engineering for chemical-mechanical planarization: fabrication of next-generation nanodevices 
SN  - 1420059114
PY  - 2009///
CY  - Boca Raton, FL
PB  - CRC Press/Taylor & Francis Group
KW  - Chemical mechanical planarization
KW  - Nanoparticles
KW  - Nanoelectronics
N1  - Includes bibliographical references and index
ER  -